Hülsenberg D., Harnisch A., Bismarck A. Microstructuring of Glasses

Springer-Verlag Berlin Heidelberg, 2008. — 339 p. — ISBN: 978-3-540-26245-9.Silicon, the second most abundant element on earth, is a well-established material in microsystems technology. Its properties and technical perfection open up an almost unlimited range of applications. Silicon is the main component of most semiconductor devices, but other materials are also applied step by step in microsystems technology so as to obtain some special properties. Glass is one such material that has some special properties. Glass-making has a history of almost six millennia. However, the science of glass started only around 1830.
The book attempts to explain the most important fundamentals, methods, features and highlights in the production of glass half products used for microstructuring as well as the microstructuring itself. It does not cover the entire subject matter, because of the growing nature of this field. Rather, the purpose of this book is to provide the newcomer to glasses with enough background to be able to access the specialist literature. Therefore, we start with the basics of glass materials and frequently refer to existing publications so that readers across cognate disciplines can easily understand what happens, for instance, between the ions in the glass and the ways in which glass processing affects the final properties of glass microdevices. The book’s aim is to present an additional source of information on the three aspects, namely, the fundamentals of glass composition and glass processing and the many different methods of its microstructuring. It provides a comprehensive discussion of the various microstructuring methods, with appropriate references to literature, so that the book can be used as a source of information for glass manufacturers, producers of microdevices, engineering professionals with a background in designing (of microdevices) and structuring processes, as well as scientists in general, and students in particular.Fundamentals of Inorganic Nonmetallic Glasses and Glass Processing
Silicate Glasses: A Class of Amorphous Materials
Thermodynamic Phenomena in Glass
Melting and Forming Glass Half Products for Microstructuring
Geometrical Microstructuring of Glasses and Applications
Introduction to Geometrical Microstructuring
Mechanical Structuring Processes
Chemical and Complex Structuring Processes
Thermal and Thermomechanical Structuring Processes
Microstructuring Glasses Using Lasers
Geometrical Photostructuring
Joining Methods for Glass Based Microdevices
Properties and Selected Applications of Microstructured Glass Devices